| 7122473 |
Edge and bevel cleaning process and system |
Jalal Ashjaee, Cyprian Emeka Uzoh, Bulent M. Basol, Homayoun Talieh |
2006-10-17 |
| 6969456 |
Method of using vertically configured chamber used for multiple processes |
Konstantin Volodarsky, Boguslaw Nagorski, Douglas W. Young, Cyprian Emeka Uzoh, Homayoun Talieh |
2005-11-29 |
| 6884334 |
Vertically configured chamber used for multiple processes |
Konstantin Volodarsky, Boguslaw A. Nigorski, Douglas W. Young, Cyprian Emeka Uzoh, Homayoun Talieh |
2005-04-26 |
| 6777338 |
Edge and bevel cleaning process and system |
Jalal Ashjaee, Cyprian Emeka Uzoh, Bulent M. Basol, Homayoun Talieh |
2004-08-17 |
| 6773576 |
Anode assembly for plating and planarizing a conductive layer |
Konstantin Volodarsky, Cyprian Emeka Uzoh, Homayoun Talieh, Douglas W. Young |
2004-08-10 |
| 6478936 |
Anode assembly for plating and planarizing a conductive layer |
Konstantin Volodarsky, Cyprian Emeka Uzoh, Homayoun Talieh, Douglas W. Young |
2002-11-12 |
| 6352623 |
Vertically configured chamber used for multiple processes |
Konstantin Volodarsky, Boguslaw Nagorski, Douglas W. Young, Cyprian Emeka Uzoh, Homayoun Talieh |
2002-03-05 |