Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068137 | Thread profiles for semiconductor process chamber components | Carlaton WONG, Timothy Joseph Franklin | 2024-08-20 |
| 11551960 | Helical plug for reduction or prevention of arcing in a substrate support | Hamid Noorbakhsh, Anwar Husain | 2023-01-10 |
| 10847347 | Edge ring assembly for a substrate support in a plasma processing chamber | Hamid Noorbakhsh, Anwar Husain | 2020-11-24 |
| 10636629 | Split slit liner door | Hamid Noorbakhsh | 2020-04-28 |