Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300473 | Electrostatic chuck for high bias radio frequency (RF) power application in a plasma processing chamber | Shahid Rauf, Peng Tian | 2025-05-13 |
| 12272575 | Advanced temperature control for wafer carrier in plasma processing chamber | Fernando Silveira, Chunlei Zhang, Phillip Criminale | 2025-04-08 |
| 12198966 | Substrate support with multiple embedded electrodes | Philip Allan Kraus, Thai Cheng Chua | 2025-01-14 |
| 11948826 | High power electrostatic chuck design with radio frequency coupling | Vijay D. Parkhe, Haitao Wang, Kartik Ramaswamy, Chunlei Zhang | 2024-04-02 |
| 11894255 | Sheath and temperature control of process kit | Kartik Ramaswamy, Daniel Sang Byun | 2024-02-06 |
| 11837479 | Advanced temperature control for wafer carrier in plasma processing chamber | Fernando Silveira, Chunlei Zhang, Phillip Criminale | 2023-12-05 |
| 11551916 | Sheath and temperature control of a process kit in a substrate processing chamber | Rajinder Dhindsa, James Rogers, Anwar Husain | 2023-01-10 |
| 11532497 | High power electrostatic chuck design with radio frequency coupling | Vijay D. Parkhe, Haitao Wang, Kartik Ramaswamy, Chunlei Zhang | 2022-12-20 |
| 11127619 | Workpiece carrier for high power with enhanced edge sealing | Kartik Ramaswamy, Chunlei Zhang, Haitao Wang, Vijay D. Parkhe | 2021-09-21 |
| 11049755 | Semiconductor substrate supports with embedded RF shield | David Benjaminson, Michael H. Grace, Soonam Park, Dmitry Lubomirsky, Nikolai Kalnin +1 more | 2021-06-29 |
| 10965972 | Method for contents playback with continuity and electronic device therefor | Pilsik Choi, Junghwan Ku, Hyun-June Kim | 2021-03-30 |
| 10937678 | Substrate support with multiple embedded electrodes | Philip Allan Kraus, Thai Cheng Chua | 2021-03-02 |
| 10930540 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Hamid Noorbakhsh +3 more | 2021-02-23 |
| 10811296 | Substrate support with dual embedded electrodes | Philip Allan Kraus | 2020-10-20 |
| 10770270 | High power electrostatic chuck with aperture-reducing plug in a gas hole | Haitao Wang, Vijay D. Parkhe, Kartik Ramaswamy, Chunlei Zhang | 2020-09-08 |
| 10714372 | System for coupling a voltage to portions of a substrate | Thai Cheng Chua, Philip Allan Kraus, Travis Koh, Christian Amormino | 2020-07-14 |
| 10510575 | Substrate support with multiple embedded electrodes | Philip Allan Kraus, Thai Cheng Chua | 2019-12-17 |
| 10504765 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Hamid Noorbakhsh +3 more | 2019-12-10 |
| 8619406 | Substrate supports for semiconductor applications | John Sirman | 2013-12-31 |