| 12456607 |
Auxiliary plasma source for robust ignition and restrikes in a plasma chamber |
Kartik Ramaswamy, Kostiantyn Achkasov, Nicolas Bright, Yang Yang, Yuanging Guo |
2025-10-28 |
|
| 12368020 |
Pulsed voltage source for plasma processing applications |
A N M Wasekul AZAD, Kartik Ramaswamy, Yang Yang, Yue Guo |
2025-07-22 |
|
| 12278094 |
Methods and apparatus for processing a substrate |
Richard Fovell, Chunlei Zhang |
2025-04-15 |
|
| 12272575 |
Advanced temperature control for wafer carrier in plasma processing chamber |
Chunlei Zhang, Phillip Criminale, Jaeyong Cho |
2025-04-08 |
|
| 12205797 |
Solid-state switch based high-speed pulser with plasma IEDF modification capability through multilevel output functionality |
Kartik Ramaswamy, Yue Guo, Yang Yang, A. N. M. Wasekul Azad |
2025-01-21 |
|
| 12125689 |
Methods and apparatus for toroidal plasma generation |
Kartik Ramaswamy, Andrew Nguyen, Yang Yang, Sathya Swaroop Ganta, Yue Guo +1 more |
2024-10-22 |
$83,950,000 |
| 12111341 |
In-situ electric field detection method and apparatus |
Yue Guo, Yang Yang, Kartik Ramaswamy, A N M Wasekul AZAD |
2024-10-08 |
$69,128,000 |
| 11972924 |
Pulsed voltage source for plasma processing applications |
A N M Wasekul AZAD, Kartik Ramaswamy, Yang Yang, Yue Guo |
2024-04-30 |
$79,776,000 |
| 11837479 |
Advanced temperature control for wafer carrier in plasma processing chamber |
Chunlei Zhang, Phillip Criminale, Jaeyong Cho |
2023-12-05 |
$45,995,000 |
| 11186721 |
Process for treatment of nanoparticles of mineral filler for use in polymerization in the presence of nanoparticles |
Dihogenes Adriano Pozzer, Olavo Martins Junior, Alessandra Coelho Silva Lucas |
2021-11-30 |
|
| 10928145 |
Dual zone common catch heat exchanger/chiller |
Brad L. Mays |
2021-02-23 |
$34,793,000 |
| 10854425 |
Feedforward temperature control for plasma processing apparatus |
Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more |
2020-12-01 |
$39,153,000 |
| 10537013 |
Distributed electro-static chuck cooling |
Richard Fovell, Hamid Tavassoli |
2020-01-14 |
$50,821,000 |
| 10410889 |
Systems and methods for electrical and magnetic uniformity and skew tuning in plasma processing reactors |
S. M. Reza Sadjadi, Haitao Wang, Jie Zhou, Tza-Jing Gung, Chunlei Zhang |
2019-09-10 |
$15,043,000 |
| 10274270 |
Dual zone common catch heat exchanger/chiller |
Brad L. Mays |
2019-04-30 |
$23,214,000 |
| 10010912 |
Particle reduction via throttle gate valve purge |
Jared Ahmad Lee, Dmitry Lubomirsky, Martin Jeff Salinas, Andrew Nguyen, Tom K. Cho +1 more |
2018-07-03 |
$29,604,000 |
| 9994648 |
Metallocene catalyst supported by hybrid supporting means, process for producing same, polymerization process for producing an ethylene homopolymer or copolymer with broad or bimodal molar mass distribution, use of the supported metallocene catalyst and ethylene polymer with broad or bimodal molar mass distribution |
Rodrigo Brambilla, Marcia Silva Lacerda Miranda, Joao Henrique Zimnoch dos Santos |
2018-06-12 |
|
| 9988465 |
Metallocene catalyst supported by hybrid supporting means, process for producing same, polymerization process for producing an ethylene homopolymer or copolymer with broad or bimodal molar mass distribution, use of the supported metallocene catalyst and ethylene polymer with broad or bimodal molar mass distribution |
Rodrigo Brambilla, Marcia Silva Lacerda Miranda, Joao Henrique Zimnoch dos Santos |
2018-06-05 |
|
| 9695254 |
Metallocene catalyst supported by hybrid supporting means, process for producing same, polymerization process for producing an ethylene homopolymer or copolymer with broad or bimodal molar mass distribution, use of the supported metallocene catalyst and ethylene polymer with broad or bimodal molar mass distribution |
Rodrigo Brambilla, Marcia Silva Lacerda Miranda, Joao Henrique Zimnoch dos Santos |
2017-07-04 |
|
| 9338871 |
Feedforward temperature control for plasma processing apparatus |
Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more |
2016-05-10 |
$10,962,000 |
| 9214315 |
Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow |
Hamid Tavassoli, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr., Brad L. Mays +5 more |
2015-12-15 |
$14,629,000 |
| 8916793 |
Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow |
Hamid Tavassoli, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr., Brad L. Mays +5 more |
2014-12-23 |
$38,476,000 |
| 6634313 |
High-frequency electrostatically shielded toroidal plasma and radical source |
Hiroji Hanawa, Kenneth S. Collins, John Trow, David Stover |
2003-10-21 |
$27,123,000 |
