Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740037 | Thermal switch | — | 2023-08-29 |
| 11204206 | Thermal switch | — | 2021-12-21 |
| 11041682 | Thermal switch | — | 2021-06-22 |
| 10892197 | Edge seal configurations for a lower electrode assembly | Keith Gaff, Anthony J. Ricci, Henry Povolny, Scott Stevenot | 2021-01-12 |
| 10866036 | Thermal switch | — | 2020-12-15 |
| 10090211 | Edge seal for lower electrode assembly | Keith Gaff, Anthony J. Ricci, Henry Povolny, Scott Stevenot | 2018-10-02 |
| 8410393 | Apparatus and method for temperature control of a semiconductor substrate support | Anthony J. Ricci, Saurabh Ullal, Michael Kang | 2013-04-02 |
| 5805593 | Routing method for setting up a service between an origination node and a destination node in a connection-communications network | — | 1998-09-08 |