Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101107 | Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods | Neil Benjamin, Anthony J. Ricci | 2021-08-24 |
| 10892179 | Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods | Neil Benjamin, Anthony J. Ricci | 2021-01-12 |
| 10892197 | Edge seal configurations for a lower electrode assembly | Keith Gaff, Matthew Busche, Anthony J. Ricci, Scott Stevenot | 2021-01-12 |
| 10879053 | Temperature controlled substrate support assembly | Anthony J. Ricci | 2020-12-29 |
| 10832979 | Feedback control system for iterative etch process | Arthur M. Howald, John C. Valcore, Jr. | 2020-11-10 |
| 10475623 | Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods | Neil Benjamin, Anthony J. Ricci | 2019-11-12 |
| 10192767 | Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Anthony J. Ricci | 2019-01-29 |
| 10102321 | System, method and apparatus for refining radio frequency transmission system models | John C. Valcore, Jr. | 2018-10-16 |
| 10090211 | Edge seal for lower electrode assembly | Keith Gaff, Matthew Busche, Anthony J. Ricci, Scott Stevenot | 2018-10-02 |
| 10079168 | Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Anthony J. Ricci | 2018-09-18 |
| 10014161 | Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Anthony J. Ricci | 2018-07-03 |
| 9911577 | Arrangement for plasma processing system control based on RF voltage | John C. Valcore, Jr. | 2018-03-06 |
| 9673025 | Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Anthony J. Ricci | 2017-06-06 |
| 9652567 | System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path | John C. Valcore, Jr. | 2017-05-16 |
| 9508529 | System, method and apparatus for RF power compensation in a plasma processing system | John C. Valcore, Jr. | 2016-11-29 |
| 9502221 | Etch rate modeling and use thereof with multiple parameters for in-chamber and chamber-to-chamber matching | John C. Valcore, Jr., Harmeet Singh | 2016-11-22 |
| 9455126 | Arrangement for plasma processing system control based on RF voltage | John C. Valcore, Jr. | 2016-09-27 |
| 9224583 | System and method for heating plasma exposed surfaces | Rajinder Dhindsa | 2015-12-29 |
| 9128473 | Arrangement for plasma processing system control based on RF voltage | John C. Valcore, Jr. | 2015-09-08 |
| 9082594 | Etch rate modeling and use thereof for in-chamber and chamber-to-chamber matching | John C. Valcore, Jr., Harmeet Singh | 2015-07-14 |
| 8832916 | Methods of dechucking and system thereof | — | 2014-09-16 |
| 8501631 | Plasma processing system control based on RF voltage | John C. Valcore, Jr. | 2013-08-06 |
| 8454027 | Adjustable thermal contact between an electrostatic chuck and a hot edge ring by clocking a coupling ring | Andreas Fischer | 2013-06-04 |
| 8216486 | Temperature control module using gas pressure to control thermal conductance between liquid coolant and component body | Rajinder Dhindsa, Jerry K. Antolik | 2012-07-10 |
| 8083855 | Temperature control module using gas pressure to control thermal conductance between liquid coolant and component body | Rajinder Dhindsa, Jerry K. Antolik | 2011-12-27 |