Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6755151 | Hot-filament chemical vapor deposition chamber and process with multiple gas inlets | Xunming Deng | 2004-06-29 |
| 6638839 | Hot-filament chemical vapor deposition chamber and process with multiple gas inlets | Xunming Deng | 2003-10-28 |