Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074521 | Replaceable upper chamber parts of plasma processing apparatus | Daniel Arthur Brown, Ian Kenworthy | 2018-09-11 |
| 7550070 | Electrode and pad assembly for processing conductive layers | Bulent M. Basol | 2009-06-23 |
| 7238092 | Low-force electrochemical mechanical processing method and apparatus | Bulent M. Basol, Cyprian Emeka Uzoh | 2007-07-03 |
| 7211174 | Method and system to provide electrical contacts for electrotreating processes | Bulent M. Basol, Homayoun Talieh, Boguslaw Nagorski, Cyprian Emeka Uzoh | 2007-05-01 |
| 7141146 | Means to improve center to edge uniformity of electrochemical mechanical processing of workpiece surface | Bulent M. Basol | 2006-11-28 |
| 6967166 | Method for monitoring and controlling force applied on workpiece surface during electrochemical mechanical processing | Bulent M. Basol, Efrain Velazquez | 2005-11-22 |