Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12031885 | Leak detection for gas sticks | Alex J. Tom, Ming Xu, Ashley M. Okada, Kenneth Le | 2024-07-09 |
| RE47275 | Substrate support providing gap height and planarization adjustment in plasma processing chamber | Jerrell K. ANTOLIK, John Holland | 2019-03-05 |
| 9093483 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more | 2015-07-28 |
| 8895452 | Substrate support providing gap height and planarization adjustment in plasma processing chamber | Jerrel K. Antolik, John Holland | 2014-11-25 |
| 8709202 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more | 2014-04-29 |
| 8702866 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more | 2014-04-22 |
| 8628675 | Method for reduction of voltage potential spike during dechucking | Brian McMillin, Jose Tong | 2014-01-14 |
| 8624210 | Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates | Shang-I Chou, Jason Autustino | 2014-01-07 |
| 8492736 | Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates | Shang-I Chou, Jason Augustino | 2013-07-23 |
| 8313612 | Method and apparatus for reduction of voltage potential spike during dechucking | Brian McMillin, Jose Tong | 2012-11-20 |
| 7854820 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more | 2010-12-21 |
| 7841582 | Variable seal pressure slit valve doors for semiconductor manufacturing equipment | Won Bae Bang, Toan Q. Tran | 2010-11-30 |
| 7754282 | Adjusting a spacing between a gas distribution member and a substrate support | Kirby H. Floyd, Adrian Q. Montgomery, Jennifer Gonzales, Won Bae Bang, Rong Pan +1 more | 2010-07-13 |
| 7722719 | Gas baffle and distributor for semiconductor processing chamber | Lawrence Chung-Lai Lei, Siqing Lu, Steven Gianoulakis, Won Bae Bang, David Sun | 2010-05-25 |
| 7456116 | Gap-fill depositions in the formation of silicon containing dielectric materials | Nitin K. Ingle, Shan Wong, Xinyun Xia, Vikash Banthia, Won Bae Bang +1 more | 2008-11-25 |
| 7335609 | Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials | Nitin K. Ingle, Shan Wong, Xinyun Xia, Vikash Banthia, Won Bae Bang | 2008-02-26 |
| 7205205 | Ramp temperature techniques for improved mean wafer before clean | Won Bae Bang, Kevin Mukai, Theresa Marie O. Liu | 2007-04-17 |
| 7204888 | Lift pin assembly for substrate processing | Toan Q. Tran, Daniel S. Herkalo, Jin Ho Lee, Dong-Hyung LEE, Jang Seok OH +1 more | 2007-04-17 |
| 7192486 | Clog-resistant gas delivery system | Won Bae Bang, Steve Ghanayem | 2007-03-20 |
| 7011710 | Concentration profile on demand gas delivery system (individual divert delivery system) | Won Bae Bang, Yeh-Jen Kao | 2006-03-14 |
| 6506994 | Low profile thick film heaters in multi-slot bake chamber | Mark Fodor, Chen-An Chen, Himanshu Pokharna, Son T. Nguyen, Kelly Fong +1 more | 2003-01-14 |
| 6176198 | Apparatus and method for depositing low K dielectric materials | Yeh-Jen Kao, Fong Chang, Robert B. Majewski, John Parks, David Wanamaker | 2001-01-23 |
| 6148761 | Dual channel gas distribution plate | Robert B. Majewski, Yeh-Jen Kao | 2000-11-21 |
| 5968588 | In-situ liquid flow rate estimation and verification by sonic flow method | Visweswaren Sivaramakrishnan, Fong Chang, Thanh Pham, Jeff Plante | 1999-10-19 |
| 5866795 | Liquid flow rate estimation and verification by direct liquid measurement | Fong Chang, Thanh Pham, Jeff Plante | 1999-02-02 |