| 12031885 |
Leak detection for gas sticks |
Alex J. Tom, Ming Xu, Ashley M. Okada, Kenneth Le |
2024-07-09 |
$62,454,000 |
| RE47275 |
Substrate support providing gap height and planarization adjustment in plasma processing chamber |
Jerrell K. ANTOLIK, John Holland |
2019-03-05 |
|
| 9093483 |
Showerhead electrode assembly with gas flow modification for extended electrode life |
Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more |
2015-07-28 |
$13,304,000 |
| 8895452 |
Substrate support providing gap height and planarization adjustment in plasma processing chamber |
Jerrel K. Antolik, John Holland |
2014-11-25 |
$10,852,000 |
| 8709202 |
Upper electrode backing member with particle reducing features |
Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more |
2014-04-29 |
$16,486,000 |
| 8702866 |
Showerhead electrode assembly with gas flow modification for extended electrode life |
Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more |
2014-04-22 |
$17,883,000 |
| 8628675 |
Method for reduction of voltage potential spike during dechucking |
Brian McMillin, Jose Tong |
2014-01-14 |
$13,463,000 |
| 8624210 |
Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates |
Shang-I Chou, Jason Autustino |
2014-01-07 |
$5,237,000 |
| 8492736 |
Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates |
Shang-I Chou, Jason Augustino |
2013-07-23 |
$7,904,000 |
| 8313612 |
Method and apparatus for reduction of voltage potential spike during dechucking |
Brian McMillin, Jose Tong |
2012-11-20 |
$3,027,000 |
| 7854820 |
Upper electrode backing member with particle reducing features |
Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more |
2010-12-21 |
$39,857,000 |
| 7841582 |
Variable seal pressure slit valve doors for semiconductor manufacturing equipment |
Won Bae Bang, Toan Q. Tran |
2010-11-30 |
$5,930,000 |
| 7754282 |
Adjusting a spacing between a gas distribution member and a substrate support |
Kirby H. Floyd, Adrian Q. Montgomery, Jennifer Gonzales, Won Bae Bang, Rong Pan +1 more |
2010-07-13 |
$12,099,000 |
| 7722719 |
Gas baffle and distributor for semiconductor processing chamber |
Lawrence Chung-Lai Lei, Siqing Lu, Steven Gianoulakis, Won Bae Bang, David Sun |
2010-05-25 |
$16,074,000 |
| 7456116 |
Gap-fill depositions in the formation of silicon containing dielectric materials |
Nitin K. Ingle, Shan Wong, Xinyun Xia, Vikash Banthia, Won Bae Bang +1 more |
2008-11-25 |
$22,144,000 |
| 7335609 |
Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials |
Nitin K. Ingle, Shan Wong, Xinyun Xia, Vikash Banthia, Won Bae Bang |
2008-02-26 |
$21,345,000 |
| 7205205 |
Ramp temperature techniques for improved mean wafer before clean |
Won Bae Bang, Kevin Mukai, Theresa Marie O. Liu |
2007-04-17 |
$10,588,000 |
| 7204888 |
Lift pin assembly for substrate processing |
Toan Q. Tran, Daniel S. Herkalo, Jin Ho Lee, Dong-Hyung LEE, Jang Seok OH +1 more |
2007-04-17 |
$10,588,000 |
| 7192486 |
Clog-resistant gas delivery system |
Won Bae Bang, Steve Ghanayem |
2007-03-20 |
$68,164,000 |
| 7011710 |
Concentration profile on demand gas delivery system (individual divert delivery system) |
Won Bae Bang, Yeh-Jen Kao |
2006-03-14 |
$17,746,000 |
| 6506994 |
Low profile thick film heaters in multi-slot bake chamber |
Mark Fodor, Chen-An Chen, Himanshu Pokharna, Son T. Nguyen, Kelly Fong +1 more |
2003-01-14 |
$32,327,000 |
| 6176198 |
Apparatus and method for depositing low K dielectric materials |
Yeh-Jen Kao, Fong Chang, Robert B. Majewski, John Parks, David Wanamaker |
2001-01-23 |
$87,341,000 |
| 6148761 |
Dual channel gas distribution plate |
Robert B. Majewski, Yeh-Jen Kao |
2000-11-21 |
$50,110,000 |
| 5968588 |
In-situ liquid flow rate estimation and verification by sonic flow method |
Visweswaren Sivaramakrishnan, Fong Chang, Thanh Pham, Jeff Plante |
1999-10-19 |
$58,429,000 |
| 5866795 |
Liquid flow rate estimation and verification by direct liquid measurement |
Fong Chang, Thanh Pham, Jeff Plante |
1999-02-02 |
$58,566,000 |
