Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411504 | Piezo position control flow ratio control | Ming Xu | 2025-09-09 |
| 12183606 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram, Marcel E. Josephson | 2024-12-31 |
| 12068135 | Fast gas exchange apparatus, system, and method | Ming Xu, Michael D. Willwerth, Duc Dang Buckius, Jeffrey Ludwig, Aditi MITHUN +1 more | 2024-08-20 |
| 12061103 | Packaging design for a flow sensor and methods of manufacturing thereof | Srikanth Krishnamurthy, Ming Xu, Ramachandra Murthy Gunturi, Vijay D. Parkhe | 2024-08-13 |
| 12031885 | Leak detection for gas sticks | Yen-Kun Wang, Alex J. Tom, Ming Xu, Kenneth Le | 2024-07-09 |
| 11923221 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram, Marcel E. Josephson | 2024-03-05 |
| 11841715 | Piezo position control flow ratio control | Ming Xu | 2023-12-12 |
| 11835974 | Pressure regulated flow controller | Ming Xu, Kenneth Le | 2023-12-05 |
| 11519773 | Methods, systems, and apparatus for mass flow verification based on choked flow | Kevin Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson | 2022-12-06 |
| 11520358 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Alexander Fernandez, Ming Xu +4 more | 2022-12-06 |
| 11462426 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram, Marcel E. Josephson | 2022-10-04 |
| 11169547 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Alexander Fernandez, Ming Xu +4 more | 2021-11-09 |
| 11150120 | Low temperature thermal flow ratio controller | Michael Kutney | 2021-10-19 |
| 10943803 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram, Marcel E. Josephson | 2021-03-09 |
| 10921827 | Pressure regulated flow controller | Ming Xu, Kenneth Le | 2021-02-16 |
| 10684159 | Methods, systems, and apparatus for mass flow verification based on choked flow | Kevin Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson | 2020-06-16 |
| 10453721 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram, Marcel E. Josephson | 2019-10-22 |
| 10269600 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram, Marcel E. Josephson | 2019-04-23 |