Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068135 | Fast gas exchange apparatus, system, and method | Ming Xu, Ashley M. Okada, Michael D. Willwerth, Jeffrey Ludwig, Aditi MITHUN +1 more | 2024-08-20 |
| 8707754 | Methods and apparatus for calibrating flow controllers in substrate processing systems | James P. Cruse, John W. Lane, Mariusch Gregor, Berrin Daran, Corie Lynn Cobb +2 more | 2014-04-29 |