| 12253190 |
Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment |
Theodoros Panagopoulos, Thorsten Lill |
2025-03-18 |
|
| 12215421 |
Systems and methods for pulse width modulated dose control |
— |
2025-02-04 |
|
| 12106946 |
Turbomolecular pump and cathode assembly for etching reactor |
Thorsten Lill |
2024-10-01 |
$207,578,000 |
| 11834736 |
Systems and methods for pulse width modulated dose control |
— |
2023-12-05 |
$84,518,000 |
| 11796085 |
Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment |
Theodoros Panagopoulos, Thorsten Lill |
2023-10-24 |
$152,530,000 |
| 11542598 |
Systems and methods for pulse width modulated dose control |
— |
2023-01-03 |
$253,745,000 |
| 10804079 |
Active showerhead |
Thorsten Lill, David Trussell |
2020-10-13 |
$92,724,000 |
| 10428807 |
Pump power consumption enhancement |
Kenneth Le |
2019-10-01 |
$20,010,000 |
| 10403476 |
Active showerhead |
Thorsten Lill, David Trussell |
2019-09-03 |
$49,398,000 |
| 10222810 |
Methods for monitoring a flow controller coupled to a process chamber |
Balarabe Mohammed, John W. Lane, Dan Joseph Healy |
2019-03-05 |
$34,874,000 |
| 10114389 |
Method and system for controlling a flow ratio controller using feedback |
— |
2018-10-30 |
$15,195,000 |
| 10108205 |
Method and system for controlling a flow ratio controller using feed-forward adjustment |
— |
2018-10-23 |
$19,549,000 |
| 9772629 |
Methods for monitoring a flow controller coupled to a process chamber |
Balarabe Mohammed, John W. Lane, Dan Joseph Healy |
2017-09-26 |
$39,692,000 |
| 9644796 |
Methods for in-situ calibration of a flow controller |
Balarabe Mohammed, John W. Lane, Dan Joseph Healy |
2017-05-09 |
$25,128,000 |
| 9327252 |
Compact device for enhancing the mixing of gaseous species |
John W. Lane, Berrin Daran, Ramachandra Murthy Gunturi, Bhaswan Manjunath, Prashanth Vasudeva |
2016-05-03 |
$10,420,000 |
| 9200754 |
N-channel flow ratio controller calibration |
John W. Lane |
2015-12-01 |
$8,913,000 |
| 9004107 |
Methods and apparatus for enhanced gas flow rate control |
John W. Lane, Michael R. Rice, Justin Hough |
2015-04-14 |
$19,339,000 |
| 8880210 |
Methods and apparatus for processing substrates using model-based control |
Keith Brian Porthouse, John W. Lane, Nir Merry, Michael R. Rice, Alex Minkovich +2 more |
2014-11-04 |
$12,728,000 |
| 8707754 |
Methods and apparatus for calibrating flow controllers in substrate processing systems |
James P. Cruse, John W. Lane, Duc Dang Buckius, Berrin Daran, Corie Lynn Cobb +2 more |
2014-04-29 |
$12,261,000 |
| 8397739 |
N-channel flow ratio controller calibration |
John W. Lane |
2013-03-19 |
$6,887,000 |
| 8205629 |
Real time lead-line characterization for MFC flow verification |
John W. Lane |
2012-06-26 |
$5,750,000 |
| 8015989 |
Method and apparatus for dampening pressure fluctuations in a fluid delivery system |
John W. Lane, Emir Vukotic |
2011-09-13 |
$7,377,000 |
| 6800833 |
Electromagnetically levitated substrate support |
Peter Reimer, Vincent Seidl |
2004-10-05 |
|
| 5944049 |
Apparatus and method for regulating a pressure in a chamber |
Christian Beyer, Keith Trenton, Robert Stolle, Rudolph Bahnen, Anja Plugge +4 more |
1999-08-31 |
$99,273,000 |
