Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12253190 | Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment | Theodoros Panagopoulos, Thorsten Lill | 2025-03-18 |
| 12215421 | Systems and methods for pulse width modulated dose control | — | 2025-02-04 |
| 12106946 | Turbomolecular pump and cathode assembly for etching reactor | Thorsten Lill | 2024-10-01 |
| 11834736 | Systems and methods for pulse width modulated dose control | — | 2023-12-05 |
| 11796085 | Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment | Theodoros Panagopoulos, Thorsten Lill | 2023-10-24 |
| 11542598 | Systems and methods for pulse width modulated dose control | — | 2023-01-03 |
| 10804079 | Active showerhead | Thorsten Lill, David Trussell | 2020-10-13 |
| 10428807 | Pump power consumption enhancement | Kenneth Le | 2019-10-01 |
| 10403476 | Active showerhead | Thorsten Lill, David Trussell | 2019-09-03 |
| 10222810 | Methods for monitoring a flow controller coupled to a process chamber | Balarabe Mohammed, John W. Lane, Dan Joseph Healy | 2019-03-05 |
| 10114389 | Method and system for controlling a flow ratio controller using feedback | — | 2018-10-30 |
| 10108205 | Method and system for controlling a flow ratio controller using feed-forward adjustment | — | 2018-10-23 |
| 9772629 | Methods for monitoring a flow controller coupled to a process chamber | Balarabe Mohammed, John W. Lane, Dan Joseph Healy | 2017-09-26 |
| 9644796 | Methods for in-situ calibration of a flow controller | Balarabe Mohammed, John W. Lane, Dan Joseph Healy | 2017-05-09 |
| 9327252 | Compact device for enhancing the mixing of gaseous species | John W. Lane, Berrin Daran, Ramachandra Murthy Gunturi, Bhaswan Manjunath, Prashanth Vasudeva | 2016-05-03 |
| 9200754 | N-channel flow ratio controller calibration | John W. Lane | 2015-12-01 |
| 9004107 | Methods and apparatus for enhanced gas flow rate control | John W. Lane, Michael R. Rice, Justin Hough | 2015-04-14 |
| 8880210 | Methods and apparatus for processing substrates using model-based control | Keith Brian Porthouse, John W. Lane, Nir Merry, Michael R. Rice, Alex Minkovich +2 more | 2014-11-04 |
| 8707754 | Methods and apparatus for calibrating flow controllers in substrate processing systems | James P. Cruse, John W. Lane, Duc Dang Buckius, Berrin Daran, Corie Lynn Cobb +2 more | 2014-04-29 |
| 8397739 | N-channel flow ratio controller calibration | John W. Lane | 2013-03-19 |
| 8205629 | Real time lead-line characterization for MFC flow verification | John W. Lane | 2012-06-26 |
| 8015989 | Method and apparatus for dampening pressure fluctuations in a fluid delivery system | John W. Lane, Emir Vukotic | 2011-09-13 |
| 6800833 | Electromagnetically levitated substrate support | Peter Reimer, Vincent Seidl | 2004-10-05 |
| 5944049 | Apparatus and method for regulating a pressure in a chamber | Christian Beyer, Keith Trenton, Robert Stolle, Rudolph Bahnen, Anja Plugge +4 more | 1999-08-31 |