Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7204669 | Semiconductor substrate damage protection system | Sungmin Cho, Peter Reimer | 2007-04-17 |
| 6800833 | Electromagnetically levitated substrate support | Mariusch Gregor, Peter Reimer | 2004-10-05 |