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Diaphragm valves and methods of operating same |
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Methods for monitoring a flow controller coupled to a process chamber |
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2019-03-05 |
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Methods for monitoring a flow controller coupled to a process chamber |
John W. Lane, Mariusch Gregor, Dan Joseph Healy |
2017-09-26 |
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Methods for in-situ calibration of a flow controller |
John W. Lane, Mariusch Gregor, Dan Joseph Healy |
2017-05-09 |
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Combination manual/pneumatic shut-off valve |
Philip Ryan Barros, Raul Martin, Mark Crockett, Eric S. Sklar |
2014-02-25 |
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Method of attaching components to fluid delivery systems using diffusion bonding |
Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more |
2011-09-20 |
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Method of increasing etchability of metals having chemical etching resistant microstructure |
Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more |
2011-09-13 |
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Manufacture of an integrated fluid delivery system for semiconductor processing apparatus |
Mark Crockett, John W. Lane, Michael DeChellis, Chris Melcer, Erica Porras +1 more |
2011-07-26 |
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Method of improving corrosion resistance of stainless steel surfaces by a process of passivation |
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2010-12-14 |
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Diffusion bonded fluid flow manifold with partially integrated inter-active component |
Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more |
2009-07-14 |
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In-line filter in a diffusion bonded layered substrate |
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2008-12-02 |
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Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate |
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2008-11-11 |
