Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11236834 | Diaphragm valves and methods of operating same | Kenneth Le, Sohrab Zokaei, Ming Xu | 2022-02-01 |
| 10222810 | Methods for monitoring a flow controller coupled to a process chamber | John W. Lane, Mariusch Gregor, Dan Joseph Healy | 2019-03-05 |
| 9772629 | Methods for monitoring a flow controller coupled to a process chamber | John W. Lane, Mariusch Gregor, Dan Joseph Healy | 2017-09-26 |
| 9644796 | Methods for in-situ calibration of a flow controller | John W. Lane, Mariusch Gregor, Dan Joseph Healy | 2017-05-09 |
| 8656953 | Combination manual/pneumatic shut-off valve | Philip Ryan Barros, Raul Martin, Mark Crockett, Eric S. Sklar | 2014-02-25 |
| 8020750 | Method of attaching components to fluid delivery systems using diffusion bonding | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more | 2011-09-20 |
| 8017028 | Method of increasing etchability of metals having chemical etching resistant microstructure | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more | 2011-09-13 |
| 7984891 | Manufacture of an integrated fluid delivery system for semiconductor processing apparatus | Mark Crockett, John W. Lane, Michael DeChellis, Chris Melcer, Erica Porras +1 more | 2011-07-26 |
| 7850786 | Method of improving corrosion resistance of stainless steel surfaces by a process of passivation | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more | 2010-12-14 |
| 7559527 | Diffusion bonded fluid flow manifold with partially integrated inter-active component | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more | 2009-07-14 |
| 7459003 | In-line filter in a diffusion bonded layered substrate | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more | 2008-12-02 |
| 7448276 | Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more | 2008-11-11 |