| 8126255 |
Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions |
Kris Bhaskar, Chetana Bhaskar, Ashok Kulkarni, Eliezer Rosengaus, Cecelia Campochiaro +6 more |
2012-02-28 |
| 8020750 |
Method of attaching components to fluid delivery systems using diffusion bonding |
Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more |
2011-09-20 |
| 8017028 |
Method of increasing etchability of metals having chemical etching resistant microstructure |
Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more |
2011-09-13 |
| 7984891 |
Manufacture of an integrated fluid delivery system for semiconductor processing apparatus |
Mark Crockett, John W. Lane, Michael DeChellis, Chris Melcer, Erica Porras +1 more |
2011-07-26 |
| 7850786 |
Method of improving corrosion resistance of stainless steel surfaces by a process of passivation |
Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more |
2010-12-14 |
| 7559527 |
Diffusion bonded fluid flow manifold with partially integrated inter-active component |
Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more |
2009-07-14 |
| 7459003 |
In-line filter in a diffusion bonded layered substrate |
Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more |
2008-12-02 |
| 7448276 |
Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate |
Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras +1 more |
2008-11-11 |