Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8020750 | Method of attaching components to fluid delivery systems using diffusion bonding | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Aneesh Khullar +1 more | 2011-09-20 |
| 8017028 | Method of increasing etchability of metals having chemical etching resistant microstructure | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Aneesh Khullar +1 more | 2011-09-13 |
| 7984891 | Manufacture of an integrated fluid delivery system for semiconductor processing apparatus | Mark Crockett, John W. Lane, Michael DeChellis, Chris Melcer, Aneesh Khullar +1 more | 2011-07-26 |
| 7935948 | Method and apparatus for monitoring and control of suck back level in a photoresist dispense system | Natarajan Ramanan | 2011-05-03 |
| 7850786 | Method of improving corrosion resistance of stainless steel surfaces by a process of passivation | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Aneesh Khullar +1 more | 2010-12-14 |
| 7567885 | Method and system for determining object height | Harald Herchen, Kim Vellore | 2009-07-28 |
| 7559527 | Diffusion bonded fluid flow manifold with partially integrated inter-active component | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Aneesh Khullar +1 more | 2009-07-14 |
| 7517469 | Method and system to measure flow velocity and volume | Harald Herchen, Tetsuya Ishikawa | 2009-04-14 |
| 7497026 | Method and system for detection of wafer centering in a track lithography tool | Harald Herchen, Lily Pang | 2009-03-03 |
| 7459003 | In-line filter in a diffusion bonded layered substrate | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Aneesh Khullar +1 more | 2008-12-02 |
| 7448276 | Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Aneesh Khullar +1 more | 2008-11-11 |