Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062553 | Method of manufacturing semiconductors using fluid delivery system | Phillip Ryan Barros, Haruyuki KUBOTA, Randolph Treur, Todd Cushman | 2024-08-13 |
| 11990354 | Method of manufacturing semiconductors using fluid delivery system | Phillip Ryan Barros, Haruyuki KUBOTA, Randolph Treur, Todd Cushman | 2024-05-21 |
| 11682565 | Fluid control system | Philip Ryan Barros, Greg Patrick Mulligan | 2023-06-20 |
| 11158521 | Liquid delivery system | Phillip Ryan Barros, Haruyuki KUBOTA, Randolph Treur, Todd Cushman | 2021-10-26 |
| 11158522 | Fluid delivery system | Philip Ryan Barros, Haruyuki KUBOTA, Randolph Treur, Todd Cushman | 2021-10-26 |
| 11094563 | Fluid control system | Philip Ryan Barros, Greg Patrick Mulligan | 2021-08-17 |
| 8020750 | Method of attaching components to fluid delivery systems using diffusion bonding | Mark Crockett, John W. Lane, Micahel DeChellis, Erica Porras, Aneesh Khullar +1 more | 2011-09-20 |
| 8017028 | Method of increasing etchability of metals having chemical etching resistant microstructure | Mark Crockett, John W. Lane, Micahel DeChellis, Erica Porras, Aneesh Khullar +1 more | 2011-09-13 |
| 7984891 | Manufacture of an integrated fluid delivery system for semiconductor processing apparatus | Mark Crockett, John W. Lane, Michael DeChellis, Erica Porras, Aneesh Khullar +1 more | 2011-07-26 |
| 7850786 | Method of improving corrosion resistance of stainless steel surfaces by a process of passivation | Mark Crockett, John W. Lane, Micahel DeChellis, Erica Porras, Aneesh Khullar +1 more | 2010-12-14 |
| 7559527 | Diffusion bonded fluid flow manifold with partially integrated inter-active component | Mark Crockett, John W. Lane, Micahel DeChellis, Erica Porras, Aneesh Khullar +1 more | 2009-07-14 |
| 7459003 | In-line filter in a diffusion bonded layered substrate | Mark Crockett, John W. Lane, Micahel DeChellis, Erica Porras, Aneesh Khullar +1 more | 2008-12-02 |
| 7448276 | Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate | Mark Crockett, John W. Lane, Micahel DeChellis, Erica Porras, Aneesh Khullar +1 more | 2008-11-11 |
| 7437944 | Method and apparatus for pressure and mix ratio control | John W. Lane | 2008-10-21 |
| 7204155 | Method and apparatus for pressure control and flow measurement | John W. Lane, Ralph Straube | 2007-04-17 |
| 7089134 | Method and apparatus for analyzing gas flow in a gas panel | Philip Ryan Barros, Raul Martin, Russell Norman | 2006-08-08 |
| 6878037 | Slurry pump control system | — | 2005-04-12 |
| 6595829 | Slurry pump control system | — | 2003-07-22 |
| 6183341 | Slurry pump control system | — | 2001-02-06 |