Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7204155 | Method and apparatus for pressure control and flow measurement | John W. Lane, Chris Melcer | 2007-04-17 |
| 6554954 | Conductive collar surrounding semiconductor workpiece in plasma chamber | Shawming Ma | 2003-04-29 |