Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Manufacture of an integrated fluid delivery system for semiconductor processing apparatus

Manufacture of an integrated fluid delivery system for semiconductor processing apparatus

US Patent 7984891 · Granted Jul 26, 2011

Estimated economic value: $10,864,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Water-savings adiabatic spray system2025
Method of manufacturing semiconductors using fluid delivery system2024
Method of manufacturing semiconductors using fluid delivery system2024
Water-savings adiabatic spray system2023
Fluid control system2023
Diaphragm valves and methods of operating same2022
Liquid delivery system2021
Fluid delivery system2021
Fluid control system2021
System and method for recovery of packets in overlay networks2021
Water-savings adiabatic spray system2020
Methods for monitoring a flow controller coupled to a process chamber2019