| 8656953 |
Combination manual/pneumatic shut-off valve |
Balarabe Mohammed, Philip Ryan Barros, Raul Martin, Eric S. Sklar |
2014-02-25 |
| 8127783 |
Pressure-insensitive mass flow controller |
Mohammed Nuhu Balarabe, Philip Ryan Barros, Raul Martin, Eric S. Sklar |
2012-03-06 |
| 8020750 |
Method of attaching components to fluid delivery systems using diffusion bonding |
John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras, Aneesh Khullar +1 more |
2011-09-20 |
| 8017028 |
Method of increasing etchability of metals having chemical etching resistant microstructure |
John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras, Aneesh Khullar +1 more |
2011-09-13 |
| 7984891 |
Manufacture of an integrated fluid delivery system for semiconductor processing apparatus |
John W. Lane, Michael DeChellis, Chris Melcer, Erica Porras, Aneesh Khullar +1 more |
2011-07-26 |
| 7850786 |
Method of improving corrosion resistance of stainless steel surfaces by a process of passivation |
John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras, Aneesh Khullar +1 more |
2010-12-14 |
| 7798388 |
Method of diffusion bonding a fluid flow apparatus |
John W. Lane, Vincent Kirchhoff, Marcel E. Josephson, Hong P. Gao, Bhaswan Manjunath |
2010-09-21 |
| 7559527 |
Diffusion bonded fluid flow manifold with partially integrated inter-active component |
John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras, Aneesh Khullar +1 more |
2009-07-14 |
| 7459003 |
In-line filter in a diffusion bonded layered substrate |
John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras, Aneesh Khullar +1 more |
2008-12-02 |
| 7448276 |
Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate |
John W. Lane, Micahel DeChellis, Chris Melcer, Erica Porras, Aneesh Khullar +1 more |
2008-11-11 |
| 6736370 |
Diaphragm valve with dynamic metal seat and coned disk springs |
Michael DeChellis |
2004-05-18 |
