Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10222810 | Methods for monitoring a flow controller coupled to a process chamber | Balarabe Mohammed, John W. Lane, Mariusch Gregor | 2019-03-05 |
| 9772629 | Methods for monitoring a flow controller coupled to a process chamber | Balarabe Mohammed, John W. Lane, Mariusch Gregor | 2017-09-26 |
| 9644796 | Methods for in-situ calibration of a flow controller | Balarabe Mohammed, John W. Lane, Mariusch Gregor | 2017-05-09 |