Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405164 | Spatial optical emission spectroscopy for etch uniformity | Blake Erickson, Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu +1 more | 2025-09-02 |
| 12068135 | Fast gas exchange apparatus, system, and method | Ming Xu, Ashley M. Okada, Michael D. Willwerth, Duc Dang Buckius, Aditi MITHUN +1 more | 2024-08-20 |
| 11668602 | Spatial optical emission spectroscopy for etch uniformity | Blake Erickson, Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu +1 more | 2023-06-06 |
| 11264252 | Chamber lid with integrated heater | Michael D. Willwerth, Benjamin Schwarz, Roberto Cesar Cotlear | 2022-03-01 |
| D931240 | Substrate support pedestal | Changhun Lee, Michael D. Willwerth | 2021-09-21 |
| 9355776 | Capacitor assemblies for coupling radio frequency (RF) and direct current (DC) energy to one or more common electrodes | Carl Johnson, Les Wojnowski, Lawrence A. Ringor | 2016-05-31 |
| 5999954 | Low-power digital filtering utilizing adaptive approximate filtering | S. Hamid Nawab, Anantha Chandrakasan, James M. Ooi, Shawn M. Verbout | 1999-12-07 |