Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387135 | Conductive wafer lift pin o-ring gripper with resistor | Michael D. Willwerth | 2022-07-12 |
| 11264252 | Chamber lid with integrated heater | Michael D. Willwerth, Jeffrey Ludwig, Benjamin Schwarz | 2022-03-01 |
| 10490435 | Cooling element for an electrostatic chuck assembly | Michael D. Willwerth, Andreas Schmid | 2019-11-26 |
| 10283397 | Substrate lift pin actuator | Michael D. Willwerth | 2019-05-07 |
| 9155184 | Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methods | Siu Tang Ng, Changhun Lee, Huutri Dao | 2015-10-06 |