Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520358 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Ming Xu +4 more | 2022-12-06 |
| 11169547 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Ming Xu +4 more | 2021-11-09 |
| 9766635 | Mass flow controller with onboard diagnostics, prognostics, and data logging | Alexei V. Smirnov, Patrick Albright, Cy Jordan, Arun Nagarajan, Michael J. Zolock +1 more | 2017-09-19 |
| 9256228 | Mass flow controller with onboard diagnostics, prognostics, and data logging | Alexei V. Smirnov, Patrick Albright, Cy Jordan, Arun Nagarajan, Michael J. Zolock +1 more | 2016-02-09 |