JA

Jerrell K. ANTOLIK

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #2,846,049 of 4,157,543Top 70%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
RE47275 Substrate support providing gap height and planarization adjustment in plasma processing chamber Yen-Kun Wang, John Holland 2019-03-05