Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7722719 | Gas baffle and distributor for semiconductor processing chamber | Lawrence Chung-Lai Lei, Siqing Lu, Won Bae Bang, David Sun, Yen-Kun Wang | 2010-05-25 |
| 7452827 | Gas distribution showerhead featuring exhaust apertures | Karthik Janakiraman | 2008-11-18 |
| 6825448 | Low residual-stress brazed terminal for heater | — | 2004-11-30 |
| 6793733 | Gas distribution showerhead | Karthik Janakiraman, Nitin K. Ingle, Zheng Yuan | 2004-09-21 |
| 6684523 | Particle removal apparatus | Joel Brad Bailey, Reginald Hunter | 2004-02-03 |
| 6441885 | Low thermal distortion extreme-UV lithography reticle | Avijit K. Ray-Chaudhuri | 2002-08-27 |
| 6395455 | Low thermal distortion Extreme-UV lithography reticle and method | Avijit K. Ray-Chaudhuri | 2002-05-28 |
| 6350310 | Crystal growth and annealing for minimized residual stress | — | 2002-02-26 |
| 6316150 | Low thermal distortion extreme-UV lithography reticle | Avijit K. Ray-Chaudhuri | 2001-11-13 |
| 6309461 | Crystal growth and annealing method and apparatus | Robert Cary Sparrow | 2001-10-30 |