| 7969465 |
Method and apparatus for substrate imaging |
Don Batson |
2011-06-28 |
| 7434485 |
Sensor device for non-intrusive diagnosis of a semiconductor processing system |
— |
2008-10-14 |
| 7331250 |
Sensor device for non-intrusive diagnosis of a semiconductor processing system |
— |
2008-02-19 |
| 7012684 |
Method and apparatus to provide for automated process verification and hierarchical substrate examination |
— |
2006-03-14 |
| 6895831 |
Sensor device for non-intrusive diagnosis of a semiconductor processing system |
— |
2005-05-24 |
| 6882416 |
Methods for continuous embedded process monitoring and optical inspection of substrates using specular signature analysis |
Eduardo Marquis |
2005-04-19 |
| 6878636 |
Method for enhancing substrate processing |
Joel Brad Bailey |
2005-04-12 |
| 6813032 |
Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques |
— |
2004-11-02 |
| 6805137 |
Method for removing contamination particles from substrates |
Joel Brad Bailey |
2004-10-19 |
| 6803998 |
Ultra low cost position and status monitoring using fiber optic delay lines |
Joel Brad Bailey |
2004-10-12 |
| 6779226 |
Factory interface particle removal platform |
Joel Brad Bailey |
2004-08-24 |
| 6725564 |
Processing platform with integrated particle removal system |
Joel Brad Bailey |
2004-04-27 |
| 6721045 |
Method and apparatus to provide embedded substrate process monitoring through consolidation of multiple process inspection techniques |
— |
2004-04-13 |
| 6707545 |
Optical signal routing method and apparatus providing multiple inspection collection points on semiconductor manufacturing systems |
— |
2004-03-16 |
| 6707544 |
Particle detection and embedded vision system to enhance substrate yield and throughput |
Sagie Tsadka |
2004-03-16 |
| 6697517 |
Particle detection and embedded vision system to enhance substrate yield and throughput |
— |
2004-02-24 |
| 6693708 |
Method and apparatus for substrate surface inspection using spectral profiling techniques |
— |
2004-02-17 |
| 6684523 |
Particle removal apparatus |
Joel Brad Bailey, Steven Gianoulakis |
2004-02-03 |
| 6677166 |
Method for confirming alignment of a substrate support mechanism in a semiconductor processing system |
— |
2004-01-13 |
| 6642853 |
Movable wireless sensor device for performing diagnostics with a substrate processing system |
— |
2003-11-04 |
| 6630995 |
Method and apparatus for embedded substrate and system status monitoring |
— |
2003-10-07 |
| 6468816 |
Method for sensing conditions within a substrate processing system |
— |
2002-10-22 |
| 6244121 |
Sensor device for non-intrusive diagnosis of a semiconductor processing system |
— |
2001-06-12 |
| 6026896 |
Temperature control system for semiconductor processing facilities |
— |
2000-02-22 |
| 5260563 |
Compact laser warning receiver |
Gerald D. Powell, Ronald E. Ham, Joseph Lenhardt, Thomas G. Ratliff |
1993-11-09 |
