Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7969465 | Method and apparatus for substrate imaging | Don Batson | 2011-06-28 |
| 7434485 | Sensor device for non-intrusive diagnosis of a semiconductor processing system | — | 2008-10-14 |
| 7331250 | Sensor device for non-intrusive diagnosis of a semiconductor processing system | — | 2008-02-19 |
| 7012684 | Method and apparatus to provide for automated process verification and hierarchical substrate examination | — | 2006-03-14 |
| 6895831 | Sensor device for non-intrusive diagnosis of a semiconductor processing system | — | 2005-05-24 |
| 6882416 | Methods for continuous embedded process monitoring and optical inspection of substrates using specular signature analysis | Eduardo Marquis | 2005-04-19 |
| 6878636 | Method for enhancing substrate processing | Joel Brad Bailey | 2005-04-12 |
| 6813032 | Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques | — | 2004-11-02 |
| 6805137 | Method for removing contamination particles from substrates | Joel Brad Bailey | 2004-10-19 |
| 6803998 | Ultra low cost position and status monitoring using fiber optic delay lines | Joel Brad Bailey | 2004-10-12 |
| 6779226 | Factory interface particle removal platform | Joel Brad Bailey | 2004-08-24 |
| 6725564 | Processing platform with integrated particle removal system | Joel Brad Bailey | 2004-04-27 |
| 6721045 | Method and apparatus to provide embedded substrate process monitoring through consolidation of multiple process inspection techniques | — | 2004-04-13 |
| 6707545 | Optical signal routing method and apparatus providing multiple inspection collection points on semiconductor manufacturing systems | — | 2004-03-16 |
| 6707544 | Particle detection and embedded vision system to enhance substrate yield and throughput | Sagie Tsadka | 2004-03-16 |
| 6697517 | Particle detection and embedded vision system to enhance substrate yield and throughput | — | 2004-02-24 |
| 6693708 | Method and apparatus for substrate surface inspection using spectral profiling techniques | — | 2004-02-17 |
| 6684523 | Particle removal apparatus | Joel Brad Bailey, Steven Gianoulakis | 2004-02-03 |
| 6677166 | Method for confirming alignment of a substrate support mechanism in a semiconductor processing system | — | 2004-01-13 |
| 6642853 | Movable wireless sensor device for performing diagnostics with a substrate processing system | — | 2003-11-04 |
| 6630995 | Method and apparatus for embedded substrate and system status monitoring | — | 2003-10-07 |
| 6468816 | Method for sensing conditions within a substrate processing system | — | 2002-10-22 |
| 6244121 | Sensor device for non-intrusive diagnosis of a semiconductor processing system | — | 2001-06-12 |
| 6026896 | Temperature control system for semiconductor processing facilities | — | 2000-02-22 |
| 5260563 | Compact laser warning receiver | Gerald D. Powell, Ronald E. Ham, Joseph Lenhardt, Thomas G. Ratliff | 1993-11-09 |