Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Particle detection and embedded vision system to enhance substrate yield and throughput

Particle detection and embedded vision system to enhance substrate yield and throughput

US Patent 6707544 · Granted Mar 16, 2004

Estimated economic value: $48,208,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for demodulating and regenerating phase modulated optical s2016
Methods, devices and systems for remote wind sensing a laser anemometer2014
Method and apparatus for substrate imaging2011
Pixel based machine for patterned wafers2008
Sensor device for non-intrusive diagnosis of a semiconductor processing system2008
Sensor device for non-intrusive diagnosis of a semiconductor processing system2008
Inspection systems using sensor array and double threshold arrangement2007
Pixel based machine for patterned wafers2006
Method and apparatus to provide for automated process verification and hierarchi2006
All-optical, tunable regenerator, reshaper and wavelength converter2005
Sensor device for non-intrusive diagnosis of a semiconductor processing system2005
Methods for continuous embedded process monitoring and optical inspection of sub2005