Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques

Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques

US Patent 6813032 · Granted Nov 2, 2004

Estimated economic value: $17,088,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for substrate imaging2011
Sensor device for non-intrusive diagnosis of a semiconductor processing system2008
Sensor device for non-intrusive diagnosis of a semiconductor processing system2008
Method and apparatus to provide for automated process verification and hierarchi2006
Sensor device for non-intrusive diagnosis of a semiconductor processing system2005
Methods for continuous embedded process monitoring and optical inspection of sub2005
Method for enhancing substrate processing2005
Method for removing contamination particles from substrates2004
Ultra low cost position and status monitoring using fiber optic delay lines2004
Factory interface particle removal platform2004
Processing platform with integrated particle removal system2004
Method and apparatus to provide embedded substrate process monitoring through co2004