Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10127652 | Defect detection and classification based on attributes determined from a standard reference image | Lisheng Gao, Raghav Babulnath, Kenong Wu | 2018-11-13 |
| 7345754 | Fourier filters and wafer inspection systems | Guoheng Zhao, Mehdi Vaez-Iravani, Andrew V. Hill | 2008-03-18 |
| 6441885 | Low thermal distortion extreme-UV lithography reticle | Steven Gianoulakis | 2002-08-27 |
| 6395455 | Low thermal distortion Extreme-UV lithography reticle and method | Steven Gianoulakis | 2002-05-28 |
| 6316150 | Low thermal distortion extreme-UV lithography reticle | Steven Gianoulakis | 2001-11-13 |
| 6285497 | Diffractive element in extreme-UV lithography condenser | William C. Sweatt | 2001-09-04 |
| 6235434 | Method for mask repair using defect compensation | Donald W. Sweeney | 2001-05-22 |
| 6206528 | Surface figure control for coated optics | Paul A. Spence, Michael P. Kanouff | 2001-03-27 |
| 6198792 | Wafer chamber having a gas curtain for extreme-UV lithography | Michael P. Kanouff | 2001-03-06 |