Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101664 | Apparatus and methods for optics protection from debris in plasma-based light source | Alexey Kuritsyn, Ye Liu, Oleg Khodykin | 2018-10-16 |
| 10034362 | Plasma-based light source | Alexey Kuritsyn, Alexander N. Bykanov, Oleg Khodykin | 2018-07-24 |
| 8563325 | Coaxial microreactor for particle synthesis | Michael Bartsch, Scott M. Ferko, Robert W. Crocker, Karl Wally | 2013-10-22 |
| 6714624 | Discharge source with gas curtain for protecting optics from particles | Neal R. Fornaciari | 2004-03-30 |
| 6206528 | Surface figure control for coated optics | Avijit K. Ray-Chaudhuri, Paul A. Spence | 2001-03-27 |
| 6198792 | Wafer chamber having a gas curtain for extreme-UV lithography | Avijit K. Ray-Chaudhuri | 2001-03-06 |