Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6714624 | Discharge source with gas curtain for protecting optics from particles | Michael P. Kanouff | 2004-03-30 |
| 6498832 | Electrode configuration for extreme-UV electrical discharge source | Paul A. Spence, Jim Chang | 2002-12-24 |
| 6356618 | Extreme-UV electrical discharge source | Richard E. Nygren, Michael A. Ulrickson | 2002-03-12 |