Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7642171 | Multi-step anneal of thin films for film densification and improved gap-fill | Nitin K. Ingle, Zheng Yuan, Vikash Banthia, Hali Forstner, Rong Pan | 2010-01-05 |
| 7456116 | Gap-fill depositions in the formation of silicon containing dielectric materials | Nitin K. Ingle, Shan Wong, Vikash Banthia, Won Bae Bang, Yen-Kun Wang +1 more | 2008-11-25 |
| 7335609 | Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials | Nitin K. Ingle, Shan Wong, Vikash Banthia, Won Bae Bang, Yen-Kun Wang | 2008-02-26 |
| 6905939 | Process for forming silicon oxide material | Zheng Yuan | 2005-06-14 |