Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887855 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, Mei Chang +1 more | 2024-01-30 |
| 10985023 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, Mei Chang +1 more | 2021-04-20 |
| 10429747 | Hybrid laser and implant treatment for overlay error correction | Mangesh Ashok BANGAR, Srinivas D. Nemani, Ellie Yieh | 2019-10-01 |
| 9601339 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, Mei Chang +1 more | 2017-03-21 |
| 9230815 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, Mei Chang +1 more | 2016-01-05 |
| 7774887 | Scrubber box and methods for using the same | Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl +4 more | 2010-08-17 |
| 7745309 | Methods for surface activation by plasma immersion ion implantation process utilized in silicon-on-insulator structure | Randhir P. S. Thakur, Stephen Moffatt, Per-Ove Hansson | 2010-06-29 |
| 7601652 | Method for treating substrates and films with photoexcitation | Kaushal K. Singh, Sean M. Seutter, Jacob Smith, R. Suryanarayanan Iyer, Adam Brailove +2 more | 2009-10-13 |
| 7377002 | Scrubber box | Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl +4 more | 2008-05-27 |
| 7192486 | Clog-resistant gas delivery system | Won Bae Bang, Yen-Kun Wang | 2007-03-20 |
| 6677247 | Method of increasing the etch selectivity of a contact sidewall to a preclean etchant | Zheng Yuan, Randhir P. S. Thakur | 2004-01-13 |
| 6638810 | Tantalum nitride CVD deposition by tantalum oxide densification | Mouloud Bakli, Huyen Tran | 2003-10-28 |
| 6602770 | Silicon layer to improve plug filling by CVD | Sandeep Desai, Scott Brad Herner | 2003-08-05 |
| 6464795 | Substrate support member for a processing chamber | Semyon Sherstinsky, Calvin Augason, Leonel A. Zuniga, Jun Zhao, Talex Sajoto +5 more | 2002-10-15 |
| 6328808 | Apparatus and method for aligning and controlling edge deposition on a substrate | Kenneth Tsai, Joseph Yudovsky, Ken Kaung Lai, Patricia M. Liu, Toshiyuki Nakagawa +1 more | 2001-12-11 |
| 6319766 | Method of tantalum nitride deposition by tantalum oxide densification | Mouloud Bakli, Huyen Tran | 2001-11-20 |
| 6309713 | Deposition of tungsten nitride by plasma enhanced chemical vapor deposition | Alfred Mak, Ling Chen, David Charles Smith, Mei Chang | 2001-10-30 |
| 6303480 | Silicon layer to improve plug filling by CVD | Sandeep Desai, Scott Brad Herner | 2001-10-16 |
| 6271129 | Method for forming a gap filling refractory metal layer having reduced stress | Maitreyee Mahajani | 2001-08-07 |
| 6251190 | Gate electrode connection structure by in situ chemical vapor deposition of tungsten and tungsten nitride | Alfred Mak, Kevin Lai, Cissy Leung, Thomas Wendling, Ping Jian | 2001-06-26 |
| 6248176 | Apparatus and method for delivering a gas | Joseph Yudovsky, Kenneth Tsai, Semyon Sherstinsky | 2001-06-19 |
| 6210483 | Anti-notch thinning heater | Ken Tsai, Joseph Yudovsky, Ken Kaung Lai | 2001-04-03 |
| 6204174 | Method for high rate deposition of tungsten | Alexander D. Glew, Andrew David Johnson, Ravi Rajagopalan | 2001-03-20 |
| 6192601 | Method and apparatus for reducing particle contamination during wafer transport | Madhavi R. Chandrachood | 2001-02-27 |
| 6186092 | Apparatus and method for aligning and controlling edge deposition on a substrate | Kenneth Tsai, Joseph Yudovsky, Ken Kaung Lai, Patricia M. Liu, Toshiyuki Nakagawa +1 more | 2001-02-13 |