Issued Patents All Time
Showing 25 most recent of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8500975 | Method and apparatus for sputtering onto large flat panels | Hien Minh Le, Akihiro Hosokawa | 2013-08-06 |
| 8398832 | Coils for generating a plasma and for sputtering | Jaim Nulman, Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes +2 more | 2013-03-19 |
| 7774887 | Scrubber box and methods for using the same | Joseph Yudovsky, Kenneth R. Reynolds, Younes Achkire, Dan Marohl, Steve Ghanayem +4 more | 2010-08-17 |
| 7550066 | Staggered target tiles | — | 2009-06-23 |
| 7513982 | Two dimensional magnetron scanning for flat panel sputtering | — | 2009-04-07 |
| 7497932 | Electro-chemical deposition system | Mark Cassidy Cridlin Lloyd, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2009-03-03 |
| 7459056 | Pad conditioning head for CMP process | Alexander S. Polyak | 2008-12-02 |
| 7377002 | Scrubber box | Joseph Yudovsky, Kenneth R. Reynolds, Younes Achkire, Dan Marohl, Steve Ghanayem +4 more | 2008-05-27 |
| 7288165 | Pad conditioning head for CMP process | Alexander S. Polyak | 2007-10-30 |
| 7256132 | Substrate centering apparatus and method | Alexander Lerner, Donald Olgato | 2007-08-14 |
| 7114693 | Stable cell platform | Donald Olgado, Timothy Joseph Franklin | 2006-10-03 |
| 6939210 | Slurry delivery arm | Alexander S. Polyak | 2005-09-06 |
| 6935466 | Lift pin alignment and operation methods and apparatus | Dmitry Lubomirsky, Sheshraj Tulshibagwale, Donald Olgado | 2005-08-30 |
| 6881310 | Cooling system for magnetron sputtering apparatus | — | 2005-04-19 |
| 6866746 | Clamshell and small volume chamber with fixed substrate support | Lawrence Chung-Lai Lei, Alfred Mak, Gwo-Chuan Tzu, Ming Xi, Walter Glenn | 2005-03-15 |
| 6783639 | Coils for generating a plasma and for sputtering | Jaim Nulman, Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes +2 more | 2004-08-31 |
| 6777352 | Variable flow deposition apparatus and method in semiconductor substrate processing | Lawrence Chung-Lai Lei | 2004-08-17 |
| 6770565 | System for planarizing metal conductive layers | Donald Olgado, Dmitry Lubomirsky, Timothy Webb | 2004-08-03 |
| 6722834 | Robot blade with dual offset wafer supports | — | 2004-04-20 |
| 6689418 | Apparatus for wafer rinse and clean and edge etching | Donald Olgado, Yeuk-Fai Edwin Mok, Arnold Kholodenko | 2004-02-10 |
| 6641701 | Cooling system for magnetron sputtering apparatus | — | 2003-11-04 |
| 6635157 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2003-10-21 |
| 6603269 | Resonant chamber applicator for remote plasma source | Be Van Vo, Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei, Sergio Edelstein +2 more | 2003-08-05 |
| 6571657 | Multiple blade robot adjustment apparatus and associated method | Donald Olgado, Timothy Joseph Franklin | 2003-06-03 |
| 6509069 | Method of reducing the cleaning requirements of a dielectric chuck surface | Robert E. Davenport | 2003-01-21 |