Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11958162 | CMP pad construction with composite material properties using additive manufacturing processes | Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. ORILALL, Daniel Redfield, Fred C. Redeker +4 more | 2024-04-16 |
| 10875145 | Polishing pads produced by an additive manufacturing process | Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more | 2020-12-29 |
| 10821573 | Polishing pads produced by an additive manufacturing process | Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more | 2020-11-03 |
| 10537974 | CMP pad construction with composite material properties using additive manufacturing processes | Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. ORILALL, Daniel Redfield, Fred C. Redeker +4 more | 2020-01-21 |
| 10384330 | Polishing pads produced by an additive manufacturing process | Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more | 2019-08-20 |
| 9873180 | CMP pad construction with composite material properties using additive manufacturing processes | Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. ORILALL, Daniel Redfield, Fred C. Redeker +4 more | 2018-01-23 |
| 6509069 | Method of reducing the cleaning requirements of a dielectric chuck surface | Avi Tepman | 2003-01-21 |
| 6506693 | Multiple loadlock system | Roger Heyder, Thomas B. Brezocsky | 2003-01-14 |
| 6450750 | Multiple loadlock system | Roger Heyder, Thomas B. Brezocsky | 2002-09-17 |
| 6241477 | In-situ getter in process cavity of processing chamber | Thomas Brezoczky, Roger Heyder | 2001-06-05 |
| 6222991 | Method for rotationally aligning and degassing semiconductor substrate within single vacuum chamber | — | 2001-04-24 |
| 6103069 | Chamber design with isolation valve to preserve vacuum during maintenance | — | 2000-08-15 |
| 6034000 | Multiple loadlock system | Roger Heyder, Thomas B. Brezocsky | 2000-03-07 |
| 5982986 | Apparatus and method for rotationally aligning and degassing semiconductor substrate within single vacuum chamber | — | 1999-11-09 |
| 5803977 | Apparatus for full wafer deposition | Avi Tepman | 1998-09-08 |
| 5792310 | Roll-on box sealing hand applicator | Craig D. Thompson | 1998-08-11 |
| 5735339 | Semiconductor processing apparatus for promoting heat transfer between isolated volumes | Avi Tepman | 1998-04-07 |
| 5673167 | Support platen with removable insert useful in semiconductor processing apparatus | Avi Tepman | 1997-09-30 |
| 5511799 | Sealing device useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential | Avi Tepman | 1996-04-30 |
| 5507499 | Method of sealing useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential | Avi Tepman | 1996-04-16 |
| 5460703 | Low thermal expansion clamping mechanism | Jaim Nulman | 1995-10-24 |
| D361086 | Roll-on box sealing hand applicator | Craig D. Thompson | 1995-08-08 |
| 5305728 | Bow sight apparatus | Dennis L. Young | 1994-04-26 |