| 11958162 |
CMP pad construction with composite material properties using additive manufacturing processes |
Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. ORILALL, Daniel Redfield, Fred C. Redeker +4 more |
2024-04-16 |
| 10875145 |
Polishing pads produced by an additive manufacturing process |
Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more |
2020-12-29 |
| 10821573 |
Polishing pads produced by an additive manufacturing process |
Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more |
2020-11-03 |
| 10537974 |
CMP pad construction with composite material properties using additive manufacturing processes |
Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. ORILALL, Daniel Redfield, Fred C. Redeker +4 more |
2020-01-21 |
| 10384330 |
Polishing pads produced by an additive manufacturing process |
Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more |
2019-08-20 |
| 9873180 |
CMP pad construction with composite material properties using additive manufacturing processes |
Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. ORILALL, Daniel Redfield, Fred C. Redeker +4 more |
2018-01-23 |
| 6509069 |
Method of reducing the cleaning requirements of a dielectric chuck surface |
Avi Tepman |
2003-01-21 |
| 6506693 |
Multiple loadlock system |
Roger Heyder, Thomas B. Brezocsky |
2003-01-14 |
| 6450750 |
Multiple loadlock system |
Roger Heyder, Thomas B. Brezocsky |
2002-09-17 |
| 6241477 |
In-situ getter in process cavity of processing chamber |
Thomas Brezoczky, Roger Heyder |
2001-06-05 |
| 6222991 |
Method for rotationally aligning and degassing semiconductor substrate within single vacuum chamber |
— |
2001-04-24 |
| 6103069 |
Chamber design with isolation valve to preserve vacuum during maintenance |
— |
2000-08-15 |
| 6034000 |
Multiple loadlock system |
Roger Heyder, Thomas B. Brezocsky |
2000-03-07 |
| 5982986 |
Apparatus and method for rotationally aligning and degassing semiconductor substrate within single vacuum chamber |
— |
1999-11-09 |
| 5803977 |
Apparatus for full wafer deposition |
Avi Tepman |
1998-09-08 |
| 5792310 |
Roll-on box sealing hand applicator |
Craig D. Thompson |
1998-08-11 |
| 5735339 |
Semiconductor processing apparatus for promoting heat transfer between isolated volumes |
Avi Tepman |
1998-04-07 |
| 5673167 |
Support platen with removable insert useful in semiconductor processing apparatus |
Avi Tepman |
1997-09-30 |
| 5511799 |
Sealing device useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential |
Avi Tepman |
1996-04-30 |
| 5507499 |
Method of sealing useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential |
Avi Tepman |
1996-04-16 |
| 5460703 |
Low thermal expansion clamping mechanism |
Jaim Nulman |
1995-10-24 |
| D361086 |
Roll-on box sealing hand applicator |
Craig D. Thompson |
1995-08-08 |
| 5305728 |
Bow sight apparatus |
Dennis L. Young |
1994-04-26 |
