Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of reducing the cleaning requirements of a dielectric chuck surface

Method of reducing the cleaning requirements of a dielectric chuck surface

US Patent 6509069 · Granted Jan 21, 2003

Estimated economic value: $45,007,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

CMP pad construction with composite material properties using additive manufactu2024
Polishing pads produced by an additive manufacturing process2020
Polishing pads produced by an additive manufacturing process2020
CMP pad construction with composite material properties using additive manufactu2020
Polishing pads produced by an additive manufacturing process2019
CMP pad construction with composite material properties using additive manufactu2018
Method and apparatus for sputtering onto large flat panels2013
Coils for generating a plasma and for sputtering2013
Scrubber box and methods for using the same2010
Staggered target tiles2009
Two dimensional magnetron scanning for flat panel sputtering2009
Electro-chemical deposition system2009