Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Two dimensional magnetron scanning for flat panel sputtering

Two dimensional magnetron scanning for flat panel sputtering

US Patent 7513982 · Granted Apr 7, 2009

Estimated economic value: $14,489,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for sputtering onto large flat panels2013
Coils for generating a plasma and for sputtering2013
Scrubber box and methods for using the same2010
Staggered target tiles2009
Electro-chemical deposition system2009
Pad conditioning head for CMP process2008
Scrubber box2008
Pad conditioning head for CMP process2007
Substrate centering apparatus and method2007
Stable cell platform2006
Slurry delivery arm2005
Lift pin alignment and operation methods and apparatus2005