Issued Patents All Time
Showing 25 most recent of 292 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991134 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2018-06-05 |
| 9879341 | Method and apparatus for microwave assisted chalcogen radicals generation for 2-D materials | Kaushal K. Singh, Deepak Jadhav, Ashutosh Agarwal, Ashish Goel, Vijay Parihar +1 more | 2018-01-30 |
| 9812328 | Methods for forming low resistivity interconnects | Kaushal K. Singh, Er-Xuan Ping, Xianmin Tang, Sundar Ramamurthy | 2017-11-07 |
| 9773695 | Integrated bit-line airgap formation and gate stack post clean | Vinod R. Purayath, Shankar Venkataraman, Nitin K. Ingle | 2017-09-26 |
| 9704723 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2017-07-11 |
| 9659792 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2017-05-23 |
| 9496167 | Integrated bit-line airgap formation and gate stack post clean | Vinod R. Purayath, Shankar Venkataraman, Nitin K. Ingle | 2016-11-15 |
| 9449850 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2016-09-20 |
| 9431267 | Semiconductor device processing tools and methods for patterning substrates | Mayur Trivedi, Sushil Padiyar, Lakshmanan Karuppiah | 2016-08-30 |
| 9378978 | Integrated oxide recess and floating gate fin trimming | Vinod R. Purayath, Shankar Venkataraman, Nitin K. Ingle | 2016-06-28 |
| 9184055 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-11-10 |
| 9165786 | Integrated oxide and nitride recess for better channel contact in 3D architectures | Vinod R. Purayath, Nitin K. Ingle | 2015-10-20 |
| 9159606 | Metal air gap | Vinod R. Purayath, Nitin K. Ingle | 2015-10-13 |
| 9153442 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-10-06 |
| 9093371 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-07-28 |
| 9023732 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-05-05 |
| 8822259 | Methods for enhancing light absorption during PV applications | Kaushal K. Singh, Robert Jan Visser, Vijay Parihar | 2014-09-02 |
| 8536492 | Processing multilayer semiconductors with multiple heat sources | Sundar Ramamurthy, Andreas Hegedus | 2013-09-17 |
| 8323754 | Stabilization of high-k dielectric materials | Christopher S. Olsen, Pravin K. Narwankar, Shreyas Kher, Shankar Muthukrishnan, Philip Allan Kraus | 2012-12-04 |
| 8288683 | Fast axis beam profile shaping for high power laser diode based annealing system | Dean Jennings, Abhilash J. Mayur, Timothy N. Thomas, Vijay Parihar, Vedapuram S. Achutharaman | 2012-10-16 |
| 8202806 | Method to avoid threshold voltage shift in thicker dielectric films | Ravi Iyer, Howard E. Rhodes | 2012-06-19 |
| 8173517 | Method for forming a self-aligned isolation structure utilizing sidewall spacers as an etch mask and remaining as a portion of the isolation structure | Fernando Gonzalez, David L. Chapek | 2012-05-08 |
| 8123860 | Apparatus for cyclical depositing of thin films | Alfred Mak, Ming Xi, Walter Glenn, Ahmad Khan, Ayad A. Al-Shaikh +2 more | 2012-02-28 |
| 8117987 | Hot wire chemical vapor deposition (CVD) inline coating tool | Dieter Haas, Pravin K. Narwankar | 2012-02-21 |
| 7989864 | Methods for enhancing capacitors having roughened features to increase charge-storage capacity | Garry Mercaldi, Michael Nuttall, Shenline Chen, Er-Xuan Ping | 2011-08-02 |