Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080573 | Temperature offset and zone control tuning | Ole LUCKNER, Wolfgang Aderhold | 2024-09-03 |
| 10504779 | Hydrogenation and nitridization processes for reducing oxygen content in a film | Johanes S. Swenberg, Wei Liu, Houda Graoui, Shashank Sharma, Rene George | 2019-12-10 |
| 10236207 | Hydrogenation and nitridization processes for reducing oxygen content in a film | Johanes S. Swenberg, Wei Liu, Houda Graoui, Shashank Sharma, Rene George | 2019-03-19 |
| 9263265 | Crystallization of amorphous films and grain growth using combination of laser and rapid thermal annealing | Shashank Sharma, Abhilash J. Mayur | 2016-02-16 |
| 8323754 | Stabilization of high-k dielectric materials | Christopher S. Olsen, Pravin K. Narwankar, Shreyas Kher, Randhir P. S. Thakur, Philip Allan Kraus | 2012-12-04 |
| 7794544 | Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system | Son T. Nguyen, Kedarnath Sangam, Miriam Schwartz, Kenric Choi, Sanjay Bhat +4 more | 2010-09-14 |