Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080573 | Temperature offset and zone control tuning | Shankar Muthukrishnan, Wolfgang Aderhold | 2024-09-03 |
| 11915953 | Apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers | Wolfgang Aderhold | 2024-02-27 |