Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12080573 | Temperature offset and zone control tuning | Shankar Muthukrishnan, Wolfgang Aderhold | 2024-09-03 | $44,731,000 |
| 11915953 | Apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers | Wolfgang Aderhold | 2024-02-27 | $57,915,000 |