| 12051576 |
Multicathode deposition system and methods |
Vibhu Jindal |
2024-07-30 |
$79,851,000 |
| 11940724 |
Reticle processing system |
Vibhu Jindal |
2024-03-26 |
$55,219,000 |
| 11860528 |
Multi-chamber substrate processing platform |
Ribhu Gautam, Vibhu Jindal, Praveen Kumar Choragudi, Vinodh Ramachandran, Arun Rengaraj |
2024-01-02 |
$40,045,000 |
| 11789358 |
Extreme ultraviolet mask blank defect reduction |
Wen Xiao, Vibhu Jindal, Weimin Li, Azeddine Zerrade |
2023-10-17 |
$42,568,000 |
| 11668003 |
Deposition system with a multi-cathode |
Vibhu Jindal |
2023-06-06 |
$40,761,000 |
| 11669008 |
Extreme ultraviolet mask blank defect reduction methods |
Wen Xiao, Shiyu Liu, Binni Varghese, Vibhu Jindal, Azeddine Zerrade |
2023-06-06 |
$40,761,000 |
| 11639544 |
Physical vapor deposition system and processes |
Vibhu Jindal, Wen Xiao |
2023-05-02 |
$66,273,000 |
| 11604151 |
Surface topography measurement apparatus and method |
Weimin Li, Wen Xiao, Vibhu Jindal |
2023-03-14 |
$86,512,000 |
| 11599016 |
Physical vapor deposition system and processes |
Vibhu Jindal, Wen Xiao |
2023-03-07 |
$32,704,000 |
| 11557473 |
System and method to control PVD deposition uniformity |
Wen Xiao, Vibhu Jindal |
2023-01-17 |
$39,427,000 |
| 11542595 |
Physical vapor deposition system and processes |
Wen Xiao, Vibhu Jindal |
2023-01-03 |
$39,123,000 |
| 11515132 |
Physical vapor deposition processing systems target cooling |
Vibhu Jindal, Vishwas Kumar Pandey |
2022-11-29 |
$23,914,000 |
| 11480865 |
Method and apparatus to improve EUV mask blank flatness |
Vibhu Jindal, Wen Xiao, Vinodh Ramachandran |
2022-10-25 |
$42,554,000 |
| 11480866 |
Method and apparatus to anneal EUV mask blank |
Herng Yau Yoong, Wen Xiao, Ribhu Gautam, Vibhu Jindal |
2022-10-25 |
$42,554,000 |
| 11422096 |
Surface topography measurement apparatus and method |
Weimin Li, Wen Xiao, Vibhu Jindal |
2022-08-23 |
$37,610,000 |
| 11410390 |
Augmented reality device for visualizing luminaire fixtures |
SANJEEV KUMAR PUVVADA SATHYANARAYANA, Pramod Kukhshal |
2022-08-09 |
|
| 11390940 |
System and method to control PVD deposition uniformity |
Wen Xiao, Vibhu Jindal |
2022-07-19 |
$63,937,000 |
| 11387085 |
Multicathode deposition system |
Vibhu Jindal, Kamatchigobinath Manoharan |
2022-07-12 |
$30,931,000 |
| 11365475 |
Physical vapor deposition chamber cleaning processes |
Vibhu Jindal, Shiyu Liu, Shuwei Liu, Wen Xiao |
2022-06-21 |
$42,836,000 |
| 11290299 |
System and methods for cloud-based monitoring and control of physical environments |
Lee Brown, Marcin Gramza, Marcin Klecha, Lokesh Narayan Raj Urs, Natarajan Ganapathy Subramanian +4 more |
2022-03-29 |
|
| 11237473 |
Physical vapor deposition system and processes |
Vibhu Jindal, Wen Xiao |
2022-02-01 |
$81,914,000 |
| 11236415 |
Deposition system with shield mount |
Vibhu Jindal |
2022-02-01 |
$81,914,000 |
| 11230761 |
Deposition system with a multi-cathode |
Vibhu Jindal |
2022-01-25 |
$92,631,000 |
| 11221599 |
Systems and methods for managing environmental conditions |
Mark Henricus Verberkt, Jurgen Mario Vangeel, Lokesh Narayan, Wijnand Johannes Rietman, Simon Dingle +4 more |
2022-01-11 |
|
| 11037769 |
Physical vapor deposition processing systems target cooling |
Vibhu Jindal, Vishwas Kumar Pandey |
2021-06-15 |
$88,912,000 |
