Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051576 | Multicathode deposition system and methods | Vibhu Jindal | 2024-07-30 |
| 11940724 | Reticle processing system | Vibhu Jindal | 2024-03-26 |
| 11860528 | Multi-chamber substrate processing platform | Ribhu Gautam, Vibhu Jindal, Praveen Kumar Choragudi, Vinodh Ramachandran, Arun Rengaraj | 2024-01-02 |
| 11789358 | Extreme ultraviolet mask blank defect reduction | Wen Xiao, Vibhu Jindal, Weimin Li, Azeddine Zerrade | 2023-10-17 |
| 11668003 | Deposition system with a multi-cathode | Vibhu Jindal | 2023-06-06 |
| 11669008 | Extreme ultraviolet mask blank defect reduction methods | Wen Xiao, Shiyu Liu, Binni Varghese, Vibhu Jindal, Azeddine Zerrade | 2023-06-06 |
| 11639544 | Physical vapor deposition system and processes | Vibhu Jindal, Wen Xiao | 2023-05-02 |
| 11604151 | Surface topography measurement apparatus and method | Weimin Li, Wen Xiao, Vibhu Jindal | 2023-03-14 |
| 11599016 | Physical vapor deposition system and processes | Vibhu Jindal, Wen Xiao | 2023-03-07 |
| 11557473 | System and method to control PVD deposition uniformity | Wen Xiao, Vibhu Jindal | 2023-01-17 |
| 11542595 | Physical vapor deposition system and processes | Wen Xiao, Vibhu Jindal | 2023-01-03 |
| 11515132 | Physical vapor deposition processing systems target cooling | Vibhu Jindal, Vishwas Kumar Pandey | 2022-11-29 |
| 11480865 | Method and apparatus to improve EUV mask blank flatness | Vibhu Jindal, Wen Xiao, Vinodh Ramachandran | 2022-10-25 |
| 11480866 | Method and apparatus to anneal EUV mask blank | Herng Yau Yoong, Wen Xiao, Ribhu Gautam, Vibhu Jindal | 2022-10-25 |
| 11422096 | Surface topography measurement apparatus and method | Weimin Li, Wen Xiao, Vibhu Jindal | 2022-08-23 |
| 11410390 | Augmented reality device for visualizing luminaire fixtures | SANJEEV KUMAR PUVVADA SATHYANARAYANA, Pramod Kukhshal | 2022-08-09 |
| 11390940 | System and method to control PVD deposition uniformity | Wen Xiao, Vibhu Jindal | 2022-07-19 |
| 11387085 | Multicathode deposition system | Vibhu Jindal, Kamatchigobinath Manoharan | 2022-07-12 |
| 11365475 | Physical vapor deposition chamber cleaning processes | Vibhu Jindal, Shiyu Liu, Shuwei Liu, Wen Xiao | 2022-06-21 |
| 11290299 | System and methods for cloud-based monitoring and control of physical environments | Lee Brown, Marcin Gramza, Marcin Klecha, Lokesh Narayan Raj Urs, Natarajan Ganapathy Subramanian +4 more | 2022-03-29 |
| 11237473 | Physical vapor deposition system and processes | Vibhu Jindal, Wen Xiao | 2022-02-01 |
| 11236415 | Deposition system with shield mount | Vibhu Jindal | 2022-02-01 |
| 11230761 | Deposition system with a multi-cathode | Vibhu Jindal | 2022-01-25 |
| 11221599 | Systems and methods for managing environmental conditions | Mark Henricus Verberkt, Jurgen Mario Vangeel, Lokesh Narayan, Wijnand Johannes Rietman, Simon Dingle +4 more | 2022-01-11 |
| 11037769 | Physical vapor deposition processing systems target cooling | Vibhu Jindal, Vishwas Kumar Pandey | 2021-06-15 |