| 11860533 |
Extreme ultraviolet mask absorber materials |
Shiyu Liu, Azeddine Zerrade, Vibhu Jindal |
2024-01-02 |
| 11720013 |
Graded interface in Bragg reflector |
Wen Xiao, Vibhu Jindal, Weimin Li |
2023-08-08 |
| 11675263 |
Extreme ultraviolet mask absorber materials |
Shiyu Liu, Vibhu Jindal |
2023-06-13 |
| 11644741 |
Extreme ultraviolet mask absorber materials |
Vibhu Jindal |
2023-05-09 |
| 11640109 |
Extreme ultraviolet mask absorber materials |
Shiyu Liu, Vibhu Jindal, Azeddine Zerrade, Ramya Ramalingam |
2023-05-02 |
| 11630385 |
Extreme ultraviolet mask absorber materials |
Wen Xiao, Vibhu Jindal, Azeddine Zerrade |
2023-04-18 |
| 11609490 |
Extreme ultraviolet mask absorber materials |
Shiyu Liu, Vibhu Jindal |
2023-03-21 |
| 11592738 |
Extreme ultraviolet mask absorber materials |
Shiyu Liu, Vibhu Jindal |
2023-02-28 |
| 11556053 |
Extreme ultraviolet mask blank hard mask materials |
Wen Xiao, Vibhu Jindal, Azeddine Zerrade |
2023-01-17 |
| 11537040 |
Extreme ultraviolet mask blank hard mask materials |
Wen Xiao, Vibhu Jindal, Azeddine Zerrade |
2022-12-27 |
| 11513437 |
Extreme ultraviolet mask absorber materials |
Shiyu Liu, Vibhu Jindal |
2022-11-29 |
| 11365475 |
Physical vapor deposition chamber cleaning processes |
Vibhu Jindal, Shiyu Liu, Sanjay Bhat, Wen Xiao |
2022-06-21 |
| 11327394 |
Graded interface in bragg reflector |
Wen Xiao, Vibhu Jindal, Weimin Li |
2022-05-10 |
| 11300871 |
Extreme ultraviolet mask absorber materials |
Shiyu Liu, Vibhu Jindal, Azeddine Zerrade |
2022-04-12 |
| 11300872 |
Extreme ultraviolet mask absorber materials |
Vibhu Jindal |
2022-04-12 |
| 11275300 |
Extreme ultraviolet mask blank defect reduction |
Sai Abhinand, Hui Ni Grace Fong, Ke Chang, Vibhu Jindal |
2022-03-15 |
| 11275302 |
Extreme ultraviolet mask absorber materials |
Vibhu Jindal |
2022-03-15 |
| 11275303 |
Extreme ultraviolet mask absorber matertals |
Vibhu Jindal |
2022-03-15 |
| 11275304 |
Extreme ultraviolet mask absorber matertals |
Vibhu Jindal |
2022-03-15 |
| 11249390 |
Extreme ultraviolet mask absorber materials |
Vibhu Jindal, Halbert Chong |
2022-02-15 |
| 11249389 |
Extreme ultraviolet mask absorber materials |
Vibhu Jindal |
2022-02-15 |
| 11249388 |
Extreme ultraviolet mask absorber materials |
Vibhu Jindal |
2022-02-15 |
| 11209727 |
Ta—Cu alloy material for extreme ultraviolet mask absorber |
Vibhu Jindal, Abbas Rastegar |
2021-12-28 |
| 11194244 |
Extreme ultraviolet mask absorber and processes for manufacture |
Chang Ke, Wen Xiao, Vibhu Jindal |
2021-12-07 |
