Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11860533 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Azeddine Zerrade, Vibhu Jindal | 2024-01-02 |
| 11720013 | Graded interface in Bragg reflector | Wen Xiao, Vibhu Jindal, Weimin Li | 2023-08-08 |
| 11675263 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal | 2023-06-13 |
| 11644741 | Extreme ultraviolet mask absorber materials | Vibhu Jindal | 2023-05-09 |
| 11640109 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal, Azeddine Zerrade, Ramya Ramalingam | 2023-05-02 |
| 11630385 | Extreme ultraviolet mask absorber materials | Wen Xiao, Vibhu Jindal, Azeddine Zerrade | 2023-04-18 |
| 11609490 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal | 2023-03-21 |
| 11592738 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal | 2023-02-28 |
| 11556053 | Extreme ultraviolet mask blank hard mask materials | Wen Xiao, Vibhu Jindal, Azeddine Zerrade | 2023-01-17 |
| 11537040 | Extreme ultraviolet mask blank hard mask materials | Wen Xiao, Vibhu Jindal, Azeddine Zerrade | 2022-12-27 |
| 11513437 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal | 2022-11-29 |
| 11365475 | Physical vapor deposition chamber cleaning processes | Vibhu Jindal, Shiyu Liu, Sanjay Bhat, Wen Xiao | 2022-06-21 |
| 11327394 | Graded interface in bragg reflector | Wen Xiao, Vibhu Jindal, Weimin Li | 2022-05-10 |
| 11300871 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal, Azeddine Zerrade | 2022-04-12 |
| 11300872 | Extreme ultraviolet mask absorber materials | Vibhu Jindal | 2022-04-12 |
| 11275300 | Extreme ultraviolet mask blank defect reduction | Sai Abhinand, Hui Ni Grace Fong, Ke Chang, Vibhu Jindal | 2022-03-15 |
| 11275302 | Extreme ultraviolet mask absorber materials | Vibhu Jindal | 2022-03-15 |
| 11275303 | Extreme ultraviolet mask absorber matertals | Vibhu Jindal | 2022-03-15 |
| 11275304 | Extreme ultraviolet mask absorber matertals | Vibhu Jindal | 2022-03-15 |
| 11249390 | Extreme ultraviolet mask absorber materials | Vibhu Jindal, Halbert Chong | 2022-02-15 |
| 11249389 | Extreme ultraviolet mask absorber materials | Vibhu Jindal | 2022-02-15 |
| 11249388 | Extreme ultraviolet mask absorber materials | Vibhu Jindal | 2022-02-15 |
| 11209727 | Ta—Cu alloy material for extreme ultraviolet mask absorber | Vibhu Jindal, Abbas Rastegar | 2021-12-28 |
| 11194244 | Extreme ultraviolet mask absorber and processes for manufacture | Chang Ke, Wen Xiao, Vibhu Jindal | 2021-12-07 |