Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11640109 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Shiyu Liu, Vibhu Jindal, Azeddine Zerrade | 2023-05-02 |
| 11454876 | EUV mask blank absorber defect reduction | Binni Varghese, Vibhu Jindal, Azeddine Zerrade, Shiyu Liu | 2022-09-27 |