Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209727 | Ta—Cu alloy material for extreme ultraviolet mask absorber | Shuwei Liu, Vibhu Jindal | 2021-12-28 |
| 10935896 | Cleaning solution mixing system with ultra-dilute cleaning solution and method of operation thereof | — | 2021-03-02 |
| 8888086 | Apparatus with surface protector to inhibit contamination | — | 2014-11-18 |
| 8539969 | Gigasonic brush for cleaning surfaces | — | 2013-09-24 |
| 8206510 | Method and apparatus for an in-situ ultraviolet cleaning tool | Yoshiaki Ikuta | 2012-06-26 |
| 8097091 | Hot source cleaning system | Andy Ma, Dave Krick, Pat Marmillion | 2012-01-17 |
| 7921859 | Method and apparatus for an in-situ ultraviolet cleaning tool | Yoshiaki Ikuta | 2011-04-12 |
| 7629556 | Laser nozzle methods and apparatus for surface cleaning | — | 2009-12-08 |
| 7497913 | Method and apparatus for colloidal particle cleaning | Sean Eichenlaub | 2009-03-03 |