Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12400905 | Method of electrostatic chuck motion control for wafer breakage prevention | Junguo LI, Yosuke Tsumita, Andrew Eunbeom Choi | 2025-08-26 | |
| 8097091 | Hot source cleaning system | Abbas Rastegar, Dave Krick, Pat Marmillion | 2012-01-17 | $9,825,000 |