Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901232 | Automatic kerf offset mapping and correction system for laser dicing | Karthik Balakrishnan, Jungrae Park, Zavier Zai Yeong Tan, James S. Papanu | 2024-02-13 |
| 11600492 | Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation process | Michael Lesley Sorensen, Karthik Elumalai, Dimantha Rajapaksa, Cheng Sun, James S. Papanu +4 more | 2023-03-07 |
| 11275300 | Extreme ultraviolet mask blank defect reduction | Shuwei Liu, Hui Ni Grace Fong, Ke Chang, Vibhu Jindal | 2022-03-15 |