Patents per Year
Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11600492 | Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation process | Sai Abhinand, Michael Lesley Sorensen, Karthik Elumalai, Dimantha Rajapaksa, James S. Papanu +4 more | 2023-03-07 | $32,704,000 |
| 11053590 | Nozzle for uniform plasma processing | Rohit Mishra, Siva Suri Chandra Rao Bhesetti, Eng Sheng Peh, Sriskantharajah Thirunavukarasu, Shoju Vayyapron | 2021-07-06 | $60,527,000 |
| 10511132 | Clamping fixture for plug electrode | Rui SUN, Kai-Jen Cheng, Hsiang-Chuan Lo | 2019-12-17 | |
| 10465288 | Nozzle for uniform plasma processing | Rohit Mishra, Siva Suri Chandra Rao Bhesetti, Eng Sheng Peh, Sriskantharajah Thirunavukarasu, Shoju Vayyapron | 2019-11-05 | $21,874,000 |
| 10272486 | Fixing gun and loading device thereof | — | 2019-04-30 |