Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053590 | Nozzle for uniform plasma processing | Rohit Mishra, Eng Sheng Peh, Sriskantharajah Thirunavukarasu, Shoju Vayyapron, Cheng Sun | 2021-07-06 |
| 10465288 | Nozzle for uniform plasma processing | Rohit Mishra, Eng Sheng Peh, Sriskantharajah Thirunavukarasu, Shoju Vayyapron, Cheng Sun | 2019-11-05 |
| 9390964 | Methods for fabricating dual damascene structures in low temperature dielectric materials | Jayagatan Ram Vijayen | 2016-07-12 |