| 12068159 |
Methods and apparatus for mask patterning debris removal |
Karthik Balakrishnan, Jungrae Park, Arunkumar TATTI, Sriskantharajah Thirunavukarasu |
2024-08-20 |
| 11721583 |
Mainframe-less wafer transfer platform with linear transfer system for wafer processing modules |
Sriskantharajah Thirunavukarasu, Karthik Balakrishnan, Karthik Elumalai |
2023-08-08 |
| 11600492 |
Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation process |
Sai Abhinand, Michael Lesley Sorensen, Karthik Elumalai, Dimantha Rajapaksa, Cheng Sun +4 more |
2023-03-07 |
| 11342226 |
Hybrid wafer dicing approach using an actively-focused laser beam laser scribing process and plasma etch process |
Karthik Balakrishnan, Jungrae Park, Sriskantharajah Thirunavukarasu |
2022-05-24 |
| 11302549 |
Substrate vacuum transport and storage apparatus |
Sriskantharajah Thirunavukarasu, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula, Ellie Yieh |
2022-04-12 |
| 11053590 |
Nozzle for uniform plasma processing |
Rohit Mishra, Siva Suri Chandra Rao Bhesetti, Sriskantharajah Thirunavukarasu, Shoju Vayyapron, Cheng Sun |
2021-07-06 |
| 10930542 |
Apparatus for handling various sized substrates |
Sriskantharajah Thirunavukarasu, Karrthik Parathithasan, Fang Jie Lim |
2021-02-23 |
| 10784134 |
Image based substrate mapper |
Karthik Balakrishnan, Sriskantharajah Thirunavukarasu |
2020-09-22 |
| 10777442 |
Hybrid substrate carrier |
Sriskantharajah Thirunavukarasu, Shoju Vayyapron, ANAND MAHADEV, Shankeerthan Kalyanasundaram |
2020-09-15 |
| 10566226 |
Multi-cassette carrying case |
Sriskantharajah Thirunavukarasu, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula, Ellie Yieh +2 more |
2020-02-18 |
| 10504762 |
Bridging front opening unified pod (FOUP) |
Karrthik Parathithasan, Fang Jie Lim, Sriskantharajah Thirunavukarasu |
2019-12-10 |
| 10465288 |
Nozzle for uniform plasma processing |
Rohit Mishra, Siva Suri Chandra Rao Bhesetti, Sriskantharajah Thirunavukarasu, Shoju Vayyapron, Cheng Sun |
2019-11-05 |
| 10446423 |
Next generation warpage measurement system |
Jun-Liang Su, Karthik Elumalai, Sriskantharajah Thirunavukarasu, Dimantha Rajapaksa |
2019-10-15 |
| 10347516 |
Substrate transfer chamber |
Sriskantharajah Thirunavukarasu, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula, Ellie Yieh |
2019-07-09 |
| 10325790 |
Methods and apparatus for correcting substrate deformity |
Sriskantharajah Thirunavukarasu, Jun-Liang Su, Shoju Vayyapron, Karthik Elumalai, Dimantha Rajapaksa +1 more |
2019-06-18 |
| 10153187 |
Methods and apparatus for transferring a substrate |
Sriskantharajah Thirunavukarasu, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula, Ellie Yieh |
2018-12-11 |
| 9818624 |
Methods and apparatus for correcting substrate deformity |
Jen Sern Lew, Tuck Foong Koh, Sriskantharajah Thirunavukarasu, Karthik Elumalai, Jun-Liang Su |
2017-11-14 |
